Publication & Citation Trends
Publications
0 total
No publications found.
Research Topics
Ion-surface interactions and analysis
(95)
Integrated Circuits and Semiconductor Failure Analysis
(63)
Diamond and Carbon-based Materials Research
(41)
Advanced Surface Polishing Techniques
(38)
Semiconductor materials and devices
(20)
Affiliations
Leibniz Association
3D-Micromac (Germany)
Leibniz Institute of Surface Engineering
TU Dresden
Leipzig University