Publication & Citation Trends
Publications
31 total
Microstructure and dielectric properties of piezoelectric magnetron sputtered w-ScxAl1−xN thin films PDF
Cited by 122
OpenAlex
Origin of the Anomalous Piezoelectric Response in Wurtzite<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:msub><mml:mi>Sc</mml:mi><mml:mi>x</mml:mi></mml:msub><mml:msub><mml:mi>Al</mml:mi><mml:mrow><mml:mn>1</mml:mn><mml:mo>−</mml:mo><mml:mi>x</mml:mi></mml:mrow></mml:msub><mml:mi mathvariant="bold">N</mml:mi></mml:math>Alloys PDF
Cited by 402
OpenAlex
Wurtzite structure Sc1−xAlxN solid solution films grown by reactive magnetron sputter epitaxy: Structural characterization and first-principles calculations PDF
Cited by 171
OpenAlex
AlN-based sputter-deposited shear mode thin film bulk acoustic resonator (FBAR) for biosensor applications — A review
Cited by 130
OpenAlex
Research Topics
Acoustic Wave Resonator Technologies
(29)
Mechanical and Optical Resonators
(14)
Advanced MEMS and NEMS Technologies
(10)
Analytical Chemistry and Sensors
(8)
Ferroelectric and Piezoelectric Materials
(5)
Affiliations
Linköping University
Uppsala University
Thinfilm (Sweden)
Institute for Technical Physics and Materials Science
Hungarian Academy of Sciences