Publication & Citation Trends
Publications
62 total
In Situ Characterization of Ferroelectric HfO2 During Rapid Thermal Annealing OA
Cited by 20
Semantic Scholar
ALD Heterojunction Ovonic Threshold Switches
Cited by 11
Semantic Scholar
Crystal Phase Distribution and Ferroelectricity in Ultrathin HfO 2 –ZrO 2 Bilayers OA
Cited by 8
Semantic Scholar
Atomic layer deposition of germanium-selenium-tellurium compounds for low-leakage, tunable ovonic threshold switches
Cited by 12
Semantic Scholar
(Invited) ALD of Phase Change and Threshold Switching Materials for Next-Generation Nonvolatile Memory Devices
Cited by 1
Semantic Scholar
Composition Controlled Atomic Layer Deposition of Phase Change Memories and Ovonic Threshold Switches with High Performance.
Cited by 35
Semantic Scholar
Physical and Electrical Characterization of ALD Chalcogenide Materials for 3D Memory Applications
Cited by 1
Semantic Scholar
Research Topics
Semiconductor materials and devices
(18)
Spectroscopy and Quantum Chemical Studies
(9)
Copper Interconnects and Reliability
(9)
Metal and Thin Film Mechanics
(8)
Phase-change materials and chalcogenides
(8)
Affiliations
Merck (Germany)
Palo Alto Research Center
Palo Alto University
Applied Materials (United States)
American Ceramic Society