YM

Yoshihiro Matsushima

Nagoya University JP

8
Publications
380
Citations
4
H-Index
3
i10-Index
0
2yr Mean Cite
-
Cite/Paper
Data combined from OpenAlex + Semantic Scholar. OA = OpenAlex S2 = Semantic Scholar
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Publications

0 total

Characterization of anisotropic etching properties of single-crystal silicon: effects of KOH concentration on etching profiles

K. Sato, M. Shikida, Y. Matsushima, T. Yamashiro, K. Asaumi - Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots, 1997
Cited by 18 Semantic Scholar

Research Topics

Perovskite Materials and Applications (4) Solid-state spectroscopy and crystallography (3) Nonlinear Optical Materials Research (2) Silicon Nanostructures and Photoluminescence (2) GaN-based semiconductor devices and materials (1)

Affiliations

Konan University
JP 1996 - 1995
Nagoya University
JP 1998 - 1998

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