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EK

Eiichi Kondoh

University of Yamanashi JP

235

Publications

1,687

Citations

22

H-Index

47

i10-Index

0

2yr Mean Cite

-

Cite/Paper

Data combined from OpenAlex + Semantic Scholar. OA = OpenAlex S2 = Semantic Scholar

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Publication & Citation Trends

Most Cited Works

Characteristics of copper deposition in a supercritical CO2 fluid

Eiichi Kondoh, Hatsuhiro Kato

Microelectronic Engineering 2002

88

Deposition of Cu and Ru Thin Films in Deep Nanotrenches/Holes Using Supercritical Carbon Dioxide

Eiichi Kondoh

Japanese Journal of Applied Physics 2004

77

Effect of oxygen plasma exposure of porous spin-on-glass films

Eiichi Kondoh, Takanori Asano, Akira Nakashima, M. Komatu

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena 2000

74

Determination of activation energies for diamond growth by an advanced hot filament chemical vapor deposition method

Eiichi Kondoh, Tomohiro Ohta, Tohru Mitomo, Kennich Ohtsuka

Applied Physics Letters 1991

72

Surface reaction kinetics of gas-phase diamond growth

Eiichi Kondoh, Tomohiro Ohta, Tohru Mitomo, Kenichi Ohtsuka

Journal of Applied Physics 1993

66

Publications

235 total

Kinetics of Deposition of Cu Thin Films in Supercritical Carbon Dioxide Solutions from a F-Free Copper(II) β-Diketone Complex

Masahiro Matsubara, M. Hirose, Kakeru Tamai, Yukihiro Shimogaki, Eiichi Kondoh - Journal of The Electrochemical Society, 2009

Cited by 32 OpenAlex

Conformal Deposition and Gap-Filling of Copper into Ultranarrow Patterns by Supercritical Fluid Deposition

Takeshi Momose, Masakazu Sugiyama, Eiichi Kondoh, Yukihiro Shimogaki - Applied Physics Express, 2008

Cited by 52 OpenAlex

Deposition kinetics and narrow-gap-filling in Cu thin film growth from supercritical carbon dioxide fluids

Eiichi Kondoh, J. Fukuda - The Journal of Supercritical Fluids, 2007

Cited by 65 OpenAlex

Deposition of Ru Thin Films from Supercritical Carbon Dioxide Fluids

Eiichi Kondoh - Japanese Journal of Applied Physics, 2005

Cited by 46 OpenAlex

Deposition of Cu and Ru Thin Films in Deep Nanotrenches/Holes Using Supercritical Carbon Dioxide

Eiichi Kondoh - Japanese Journal of Applied Physics, 2004

Cited by 77 OpenAlex

Characteristics of copper deposition in a supercritical CO2 fluid

Eiichi Kondoh, Hatsuhiro Kato - Microelectronic Engineering, 2002

Cited by 88 OpenAlex

Comparative Study of Pore Size of Low-Dielectric-Constant Porous Spin-on-Glass Films Using Different Methods of Nondestructive Instrumentation

Eiichi Kondoh, Mikhaı̈l R. Baklanov, Eric Lin, David Gidley, Akira Nakashima - Japanese Journal of Applied Physics, 2001

Cited by 44 OpenAlex

New service feature of carrier class edge router IX5010/5020

Ken‐ichi Katsumata, T. Iwano, M. Ono, Motoya Tatsukawa, E. Kondoh - Unknown Venue, 2001

Cited by 0 Semantic Scholar

Effect of oxygen plasma exposure of porous spin-on-glass films

Eiichi Kondoh, Takanori Asano, Akira Nakashima, M. Komatu - Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena, 2000

Cited by 74 OpenAlex

Self-aligned CoSi/sub 2/ for 0.18 μm and below

Karen Maex, A. Lauwers, Paul R. Besser, Eiichi Kondoh, M. de Potter et al. - IEEE Transactions on Electron Devices, 1999

Cited by 56 OpenAlex

Research Topics

Copper Interconnects and Reliability (57) Phase Equilibria and Thermodynamics (40) Semiconductor materials and devices (38) Optical Polarization and Ellipsometry (32) Catalytic Processes in Materials Science (27)

Frequent Co-Authors

TO

Tomohiro Ohta

5 joint publications

TO

Tohru Mitomo

4 joint publications

AK

Akira Nakashima

2 joint publications

KE

Kennich Ohtsuka

2 joint publications

YU

Yukihiro Shimogaki

2 joint publications

HA

Hatsuhiro Kato

1 joint publication

Affiliations

Nippon Steel (Japan)

JP 2002 - 1991

Max Planck Society

DE 1997 - 1997

Waseda University

JP 1991 - 1991

Kawasaki Heavy Industries (Japan)

JP 1992 - 1992

Kyushu Institute of Technology

JP 2000 - 1999

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